| US 7,463,454 B2 | ||
| Micro-actuator for hard drive utilizing insulating portions to separate biasing regions from adjacent regions of the micro-actuator and simplified manufacture process therefore | ||
| Ubaldo Mastromatteo, Bareggio (Italy); Bruno Murari, Monza (Italy); Paolo Ferrari, Gallarate (Italy); and Simone Sassolini, Sansepoi Cro (Italy) | ||
| Assigned to STMicroelectronics S.R.L., Agrate Brianza (Italy) | ||
| Filed on Jun. 14, 2007, as Appl. No. 11/818,659. | ||
| Application 11/818659 is a division of application No. 10/601332, filed on Jun. 20, 2003, granted, now 7,239,487. | ||
| Claims priority of application No. 02425407 (EP), filed on Jun. 20, 2002. | ||
| Prior Publication US 2007/0247761 A1, Oct. 25, 2007 | ||
| Int. Cl. G11B 5/56 (2006.01) | ||
| U.S. Cl. 360—294.2 [310/40 MM] | 24 Claims |
| 1. A process for manufacturing a micro-electro-mechanical device, comprising the steps of:
forming a body of semiconductor material having a thickness;
forming, in said body, a mobile part and a fixed part,
said mobile part comprising a platform, supporting arms extending from said mobile platform to said fixed part, and mobile
electrodes fixed to said platform;
said fixed part comprising fixed electrodes facing said mobile electrodes, at least one first biasing region fixed to said
fixed electrodes, and one second biasing region fixed to said supporting arms, and
forming, in said body, an insulating region of insulating material extending through the entire thickness of said body,
wherein said insulating region is shaped so as to insulate electrically at least one between said first and second biasing
regions from the rest of said fixed part.
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