| US 7,611,827 B2 | ||
| Photosensitive resin composition, ink jet head using photosensitive resin composition, and process for manufacturing ink jet head | ||
| Hiroe Ishikura, Kawasaki (Japan); Shoji Shiba, Kawasaki (Japan); and Akihiko Okano, Atsugi (Japan) | ||
| Assigned to Canon Kabushiki Kaisha, Toyko (Japan) | ||
| Appl. No. 10/577,255 PCT Filed Jun. 24, 2005, PCT No. PCT/JP2005/012160 § 371(c)(1), (2), (4) Date Apr. 26, 2006, PCT Pub. No. WO2006/001515, PCT Pub. Date Jan. 05, 2006. |
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| Claims priority of application No. 2004-190484 (JP), filed on Jun. 28, 2004. | ||
| Prior Publication US 2007/0081048 A1, Apr. 12, 2007 | ||
| Int. Cl. G03F 7/26 (2006.01) | ||
| U.S. Cl. 430—312 [430/270.1; 430/320] | 10 Claims |
| 1. A process for manufacturing an ink jet head comprising a discharge port for discharging an ink, an ink flow path communicated
with said discharge port, and a substrate provided with an energy generating element for generating energy for discharging
ink from the discharge port, characterized in that the process comprises:
providing a precursor comprising a first photosensitive resin layer laminated by a second photosensitive resin layer on said
substrate, the second photosensitive resin layer including a composition comprising (a) a polyacrylate resin having structural
unit represented by the following general formula (1), wherein the first photosensitive resin layer is positioned on the side
of the substrate
 wherein, X represents a hydroxyl group or a methylolamino group; R1 and R2 independently represent a hydrogen atom, or an alkyl group having 1 to 3 carbon atoms; R3 represents an alkyl group having 1 to 3 carbon atoms, an alkoxyl group having 1 to 3 carbon atoms, or an aralkyl group having
an aryl group or alkyl group with 1 to 2 carbon atoms; n represents a positive integer; and m represents 0 or a positive integer,
and (b) a compound represented by the following general formula (2)
 wherein R1 to R6 independently represents a hydrogen atom, a methylol group, or an alkoxymethyl group to which an alkoxy group having 1 to
4 carbon atoms is bonded; provided that, at least two of R1 to R6 represent methylol groups, or alkoxymethyl groups to which an alkoxy group having 1 to 4 carbon atoms is bonded;
patterning, by a photolithographic process, said second photosensitive resin layer to form a second ink flow path pattern
which has a shape of a portion of the ink flow path;
patterning said first photosensitive resin layer to form a first ink flow path pattern which has a shape of another portion
of the ink flow path;
providing a coating resin layer for forming the wall of the ink flow path on said first ink flow path pattern and the second
flow path pattern;
forming an ink discharge port in the coating resin layer; and
removing the first ink flow path pattern and the second ink flow path pattern to form the ink flow path.
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