| US 7,601,971 B2 | ||
| Charged beam gun | ||
| Takeshi Tanaka, Hitachi (Japan); and Hiroyasu Kaga, Mito (Japan) | ||
| Assigned to Hitachi High-Technologies Corporation, Tokyo (Japan) | ||
| Filed on Dec. 12, 2007, as Appl. No. 11/954,401. | ||
| Claims priority of application No. 2006-334370 (JP), filed on Dec. 12, 2006. | ||
| Prior Publication US 2008/0135756 A1, Jun. 12, 2008 | ||
| Int. Cl. H01J 37/073 (2006.01); H01J 49/08 (2006.01); H01J 49/10 (2006.01) | ||
| U.S. Cl. 250—423F [250/423 R; 250/430; 250/493.1; 315/111.81] | 9 Claims |
| 1. A charged beam apparatus, comprising:
a vacuum container housing a charged beam gun;
a heater that heats the vacuum container;
a connecting bushing having at its bottom a bushing terminal connected to a cable via which a high voltage is fed to the charged
beam gun; and
a receiving-side flange provided for the vacuum container and having a flange terminal to be connected to the bushing terminal,
which removably supports the connecting bushing,
wherein an insulating liquid is charged into a gap formed between the receiving-side flange and the connecting bushing,
the connecting bushing is provided with first piping and second piping that provide communication between the gap and atmospheric
air, and the first piping and the second piping are each provided with a valve.
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