	US 7,601,240 B2
	Disturbance-free, recipe-controlled plasma processing system and method
Akira Kagoshima, Kudamatsu (Japan); Hideyuki Yamamoto, Kudamatsu (Japan); Shoji Ikuhara, Hikari (Japan); Toshio Masuda, Toride (Japan); Hiroyuki Kitsunai, Chiyoda (Japan); Junichi Tanaka, Tsuchiura (Japan); Natsuyo Morioka, Tokyo (Japan); and Kenji Tamaki, Yokohama (Japan)
Assigned to Hitachi, Ltd., Tokyo (Japan)
Filed on Feb. 03, 2006, as Appl. No. 11/346,298.
Application 10/350061 is a division of application No. 09/946503, filed on Sep. 06, 2001, granted, now 6,733,618.
Application 11/346298 is a continuation of application No. 10/933413, filed on Sep. 03, 2004.
Application 10/933413 is a continuation of application No. 10/350061, filed on Jan. 24, 2003, granted, now 6,881,352.
Claims priority of application No. 2001-198830 (JP), filed on Jun. 29, 2001.
Prior Publication US 2006/0124243 A1, Jun. 15, 2006
Int. Cl. H01L 21/00 (2006.01); C23C 16/00 (2006.01); C23C 14/00 (2006.01)

U.S. Cl. 156—345.24 [156/345.25; 156/345.28; 118/712]

2 Claims

1. A plasma processing apparatus comprising:

first means for calculating an optimum recipe on the basis of a target value and an optimum recipe calculation model;

second means for selecting a recipe closest to said calculated optimum recipe from a plurality of previously stored usable recipes;

third means for plasma-processing a sample based on the said selected recipe;

an in-situ sensor for monitoring a condition of the plasma processing and providing monitored information;

fourth means for estimating processed result on the basis of monitored information from the sensor and processed result estimation model;

fifth means for correcting the optimum recipe calculation model on the basis of estimated processed result and target value; and

sixth means for determining an optimum recipe for a next sample based on the target value and the corrected optimum recipe calculation model for selecting a closest previously-stored usable recipe, and for processing the next sample by the selected recipe.