| US 7,598,597 B2 | ||
| Segmented magnetic shielding elements | ||
| Yimin Guo, San Jose, Calif. (US); and Po-Kang Wang, San Jose, Calif. (US) | ||
| Assigned to MagIC Technologies, Inc., Milpitas, Calif. (US) | ||
| Filed on Nov. 03, 2008, as Appl. No. 12/290,703. | ||
| Application 12/290703 is a division of application No. 11/182255, filed on Jul. 15, 2005, granted, now 7,445,942. | ||
| Prior Publication US 2009/0065909 A1, Mar. 12, 2009 | ||
| Int. Cl. H01L 21/00 (2006.01) | ||
| U.S. Cl. 257—659 [438/3; 365/171; 257/E21.665; 257/213; 257/422; 257/508; 257/660] | 9 Claims |
| 1. An effective magnetic shielding structure for a segmented MRAM array, having a top surface, comprising:
a number of bit slice segments each of which contains a number of bit lines;
a number of word lines, each such word line being independently addressable whereby it can interact with one and only one
of said bit slice segments at any given time;
a first dielectric layer on said array top surface;
on said first dielectric layer, a plurality of soft magnetic segmented shields, each of which fully covers and overlaps one
of said bit slice segments, said segmented shields being spaced a distance apart from one another;
at each end of each of said segmented shields, a pad of magnetic material that applies a permanent longitudinal magnetic bias
to its associated segmented shield, each such pad overlapping its associated segmented shield without overlapping any part
of its associated bit slice segment, whereby each segmented shield is a single magnetic domain;
a second dielectric layer that fully covers said MRAM array and said segmented shields and pads; and
a master magnetic shield layer on said second dielectric layer.
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