| US 7,593,099 B2 | ||
| Method and device for configuration examination | ||
| Hideyuki Ohtake, Kariya (Japan); and Toshiharu Sugiura, Tokoname (Japan) | ||
| Assigned to Aisin Seiki Kabushiki Kaisha, Aichi-ken (Japan) | ||
| Filed on Oct. 09, 2007, as Appl. No. 11/869,312. | ||
| Claims priority of application No. 2006-276513 (JP), filed on Oct. 10, 2006. | ||
| Prior Publication US 2008/0084554 A1, Apr. 10, 2008 | ||
| Int. Cl. G01N 21/00 (2006.01) | ||
| U.S. Cl. 356—237.2 [356/237.1; 356/601] | 6 Claims |
| 1. A method of examining a configuration of a sample having a pre-known refractive index, comprising the steps of;
irradiating a terahertz pulsed light, which possesses a wavelength to transmit through the sample, to at least two different
portions of the sample, the at least two different portions having a first portion and a second portion;
detecting each electric field amplitude-time resolved waveform of the terahertz pulsed light transmitted for every part through
plural portions of the sample; and
examining the configuration of the sample based upon the pre-known refractive index of the sample and phase information obtained
from the electric field amplitude-time resolved waveforms detected.
|