US 7,567,726 B2
Method and arrangement for suppressing stray light
Peter Westphal, Jena (Germany)
Assigned to Carl Zeiss Jena GmbH, Jena (Germany)
Filed on Nov. 04, 2005, as Appl. No. 11/266,236.
Claims priority of application No. 10 2004 053 730 (DE), filed on Nov. 06, 2004.
Prior Publication US 2006/0098895 A1, May 11, 2006
Int. Cl. G06K 9/00 (2006.01)
U.S. Cl. 382—274  [382/321] 31 Claims
 
1. A method for imaging an object onto a position-resolving detector utilizing a wide-field optic while suppressing stray light, said method comprising the steps of:
illuminating said object in at least one plane of said object with at least two illumination patterns;
detecting images corresponding to each one of said illumination patterns with each one of said illumination patterns having bright regions and dark regions with said dark regions completely covering said object when said illumination patterns are superposed;
determining a dark image of said object from the detected images;
generating a bright image of said object; and,
subtracting said dark image from said bright image.