| US 7,567,350 B2 | ||
| Apparatus and method for measuring displacement, surface profile and inner radius | ||
| Hong-Xi Cao, Hsinchu Hsien (Taiwan); Jen-Chuen Liao, Hsinchu Hsien (Taiwan); Ricky Hsu, Hsinchu Hsien (Taiwan); Sheng-Jang Cheng, Hsinchu Hsien (Taiwan); and Ji-Bin Horng, Hsinchu Hsien (Taiwan) | ||
| Assigned to Industrial Technology Research Institute, Hsinchu Hsien (Taiwan) | ||
| Filed on May 24, 2006, as Appl. No. 11/439,228. | ||
| Claims priority of application No. 94117011 A (TW), filed on May 25, 2005. | ||
| Prior Publication US 2006/0268286 A1, Nov. 30, 2006 | ||
| Int. Cl. G01B 11/14 (2006.01) | ||
| U.S. Cl. 356—614 [356/601] | 15 Claims |
| 1. An apparatus for measuring displacement of a moving object, comprising:
light emitting means for providing a light source with multiple wavelengths or a spectrum;
light dispersing means for receiving light from the light emitting means and respectively focusing rays with different wavelengths
from the light source into different focal points with different intervals, and when the moving object is moving within a
dispersing range of the focal points, the light dispersing means provides rays with different wavelengths returned by the
moving object; and
wavelength measuring means for measuring the wavelengths of the rays returned when the moving object is moving within the
dispersing range of the focal points, such that the displacement of the moving object is learned from variation of the measured
wavelengths of the returned rays,
wherein the light emitting means comprises a light emitting component for providing the light source, and a penetrating component
is provided on a surface of the light emitting component where the light source is not provided, for providing a transmission
channel for the rays that are returned by reflection or dispersion when the moving object is moving within the dispersing
range of the focal points.
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