| US 7,565,725 B2 | ||
| Method for forming a variable capacitor | ||
| Guillaume Bouche, Portland, Oreg. (US); Fabrice Casset, Tencin (France); and Pascal Ancey, Revel (France) | ||
| Assigned to STMicroeectronics S.A., Montrouge (France); and Commissariat a l'energie Atomique, Paris Cedex (France) | ||
| Filed on Aug. 30, 2006, as Appl. No. 11/512,731. | ||
| Claims priority of application No. 05 52645 (FR), filed on Aug. 31, 2005. | ||
| Prior Publication US 2007/0087513 A1, Apr. 19, 2007 | ||
| Int. Cl. H01G 7/00 (2006.01) | ||
| U.S. Cl. 29—25.42 [29/592.1; 29/832; 29/837; 29/842; 29/852; 83/29; 83/35; 83/36; 83/50; 361/311; 361/312; 361/313] | 15 Claims |
| 1. A method for forming a variable capacitor that has a conductive strip covering an inside of a cavity, and a flexible conductive
membrane placed above the cavity, wherein the formation of the cavity comprises:
forming a recess in a first substrate;
placing a malleable material in the recess;
stamping the malleable material into a desired shape with a stamp to define the inside of the cavity of the variable capacitor;
hardening the malleable material; and
removing the stamp.
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