| US 7,564,549 B2 | ||
| Carbon nanotube nanometrology system | ||
| Thomas A. Campbell, Evergreen, Colo. (US); and Kent D. Henry, Laramie, Wyo. (US) | ||
| Assigned to ADA Technologies, Littleton, Colo. (US) | ||
| Filed on May 08, 2007, as Appl. No. 11/745,779. | ||
| Claims priority of provisional application 60/799198, filed on May 09, 2006. | ||
| Claims priority of provisional application 60/886583, filed on Jan. 25, 2007. | ||
| Prior Publication US 2007/0264185 A1, Nov. 15, 2007 | ||
| Int. Cl. G01J 3/44 (2006.01) | ||
| U.S. Cl. 356—301 | 15 Claims |
| 11. A system for performing metrology of a sample of fullerenes, the system comprising:
an illumination source that produces a first energy beam;
a pyroelectric detector upon which the sample is attached and that produces a first output signal in response to the first
energy beam;
a laser arranged to provide a second energy beam to the sample, wherein the second energy beam causes the sample to emit a
third energy beam;
a Raman detector that receives the third energy beam and produces a second output signal in response to the third energy beam;
a light-tight enclosure that encloses the illumination source and laser, wherein the light-tight enclosure has a slit for
transmitting an energy beam to the sample; and
a light-tight barrier that separates the light-tight enclosure into at least two portions, wherein the illumination source
and the slit are in different portions of the light-tight enclosure.
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