| US 7,548,364 B2 | ||
| Ultra-fast beam dithering with surface acoustic wave modulator | ||
| Dean Jennings, Beverly, Mass. (US) | ||
| Assigned to Applied Materials, Inc., Santa Clara, Calif. (US) | ||
| Filed on Jul. 31, 2006, as Appl. No. 11/461,395. | ||
| Prior Publication US 2008/0024855 A1, Jan. 31, 2008 | ||
| Int. Cl. G02F 1/11 (2006.01); G02F 1/33 (2006.01) | ||
| U.S. Cl. 359—285 [359/305] | 13 Claims |
| 1. An apparatus for processing a coherent light pulse, comprising:
a piezoelectric material having an optical interface surface that comprises a substantially light-reflecting surface; and
a surface acoustic wave (SAW) producing device disposed on the piezoelectric material for producing a SAW that alters the
characteristics of light incident on the optical interface surface, wherein the SAW-producing device comprises an interdigital
transducer (IDT) mounted on the piezoelectric material and proximate the light-reflecting surface, the IDT having:
an electrode disposed on a first edge of the light-reflecting surface;
a reflector disposed on a second edge of the light-reflecting surface, wherein the reflector is opposite and substantially
parallel to the electrode; and
a spacing between the electrode and the reflector selected to produce a standing SAW on the light-reflecting surface between
the electrode and the reflector.
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