| US 7,521,769 B2 | ||
| Photonic crystal biosensor structure and fabrication method | ||
| Brian T. Cunningham, Champaign, Ill. (US) | ||
| Assigned to SRU Biosystems, Inc., Woburn, Mass. (US) | ||
| Filed on Jul. 08, 2005, as Appl. No. 11/177,707. | ||
| Prior Publication US 2007/0009380 A1, Jan. 11, 2007 | ||
| Int. Cl. H01L 23/00 (2006.01) | ||
| U.S. Cl. 257—414 [257/466] | 31 Claims |
| 1. A sensor comprising a nanoporous material, having a low refractive index, supported on a bottom surface by a substrate,
and coated on a top surface with a high dielectric constant dielectric coating;
wherein, the high dielectric constant dielectric coating or the high dielectric constant dielectric coating in combination
with the nanoporous material form a sub-wavelength period grating structure;
wherein, when the sensor is illuminated a resonant grating effect is produced on a reflected radiation spectrum; and
wherein the depth and period of the sub-wavelength period grating structure are less than the wavelength of the resonant grating
effect.
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