| US 7,518,780 B2 | ||
| Nanolaminate deformable mirrors | ||
| Alexandros P. Papavasiliou, Oakland, Calif. (US); and Scot S. Olivier, Santa Cruz, Calif. (US) | ||
| Assigned to Lawrence Livermore National Laboratory, LLC, Livermore, Calif. (US) | ||
| Filed on Aug. 08, 2006, as Appl. No. 11/501,590. | ||
| Claims priority of provisional application 60/706657, filed on Aug. 08, 2005. | ||
| Claims priority of provisional application 60/706643, filed on Aug. 08, 2005. | ||
| Prior Publication US 2008/0037103 A1, Feb. 14, 2008 | ||
| Int. Cl. G02B 26/00 (2006.01); G02B 7/182 (2006.01) | ||
| U.S. Cl. 359—290 [359/849; 359/872] | 24 Claims |
| 1. A deformable mirror, comprising:
a substrate;
a resilient layer coupled to said substrate;
a plurality of electrodes electrically coupled to said resilient layer, wherein each of said electrodes and said resilient
layer are adapted to have a respective applied potential so as to dynamically change the shape of said resilient layer; and
a nanolaminate configured with an optical finish of less than about 0.5 nm and conformably coupled to said resilient layer.
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