| US 7,518,737 B2 | ||
| Displacement-measuring optical device with orifice | ||
| Neal Allen Hall, Albuquerque, N. Mex. (US); and Fahrettin Levent Degertekin, Decatur, Ga. (US) | ||
| Assigned to Georgia Tech Research Corp., Atlanta, Ga. (US) | ||
| Filed on Apr. 17, 2006, as Appl. No. 11/405,053. | ||
| Application 11/405053 is a continuation in part of application No. 10/704932, filed on Nov. 10, 2003, granted, now 7,116,430. | ||
| Application 10/704932 is a continuation in part of application No. 10/112490, filed on Mar. 29, 2002, granted, now 6,753,969. | ||
| Claims priority of provisional application 60/424810, filed on Nov. 08, 2002. | ||
| Prior Publication US 2006/0192976 A1, Aug. 31, 2006 | ||
| Int. Cl. G01B 9/02 (2006.01); G01B 11/02 (2006.01) | ||
| U.S. Cl. 356—521 [356/498; 356/506] | 27 Claims |
| 1. A fabricated device comprising:
a phase-sensitive reflective diffraction grating for reflecting a first portion of an incident light and transmitting a second
portion of the incident light such that the second portion of the incident light is diffracted;
a mechanical structure having a first region and a second region, the mechanical structure positioned a distance d above the
diffraction grating and forming a wall of a cavity, the second portion of the incident light is reflected off of the first
region of the structure such that an interference pattern is formed by the reflected first portion and the reflected second
portion of the incident light; and
an orifice formed in the mechanical structure to provide for the passage of air between the inside and outside of the cavity.
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