| US 7,518,481 B2 | ||
| Slotted magnetic material for integrated circuit inductors | ||
| Donald S. Gardner, Mountain View, Calif. (US); Gerhard Schrom, Hillsboro, Oreg. (US); Peter Hazucha, Beaverton, Oreg. (US); Fabrice Paillet, Hillsboro, Oreg. (US); and Tanay Karnik, Portland, Oreg. (US) | ||
| Assigned to Intel Corporation, Santa Clara, Calif. (US) | ||
| Filed on Jun. 30, 2006, as Appl. No. 11/479,236. | ||
| Prior Publication US 2008/0001699 A1, Jan. 03, 2008 | ||
| Int. Cl. H01F 5/00 (2006.01) | ||
| U.S. Cl. 336—200 [336/232; 336/223] | 11 Claims |
| 1. An inductor comprising:
a plurality of metal lines; and
a slotted magnetic material adjacent to the metal lines, the slotted magnetic material comprising:
a seed layer;
a patterned insulator formed on the seed layer, the patterned insulator defining a plurality of slots; and
a magnetic material formed in the slots and coupled to the seed layer of magnetic material.
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