| US 7,518,474 B1 | ||
| Piezoelectric in-line RF MEMS switch and method of fabrication | ||
| Jeffrey S. Pulskamp, Mclean, Va. (US); Ronald G. Polcawich, Derwood, Md. (US); and Daniel C. Judy, Odenton, Md. (US) | ||
| Assigned to The United Sates of America as represented by the Secretary of the Army, Washington, D.C. (US) | ||
| Filed on Feb. 06, 2006, as Appl. No. 11/347,291. | ||
| Int. Cl. H01P 1/10 (2006.01); H01H 57/00 (2006.01) | ||
| U.S. Cl. 333—262 [333/105] | 24 Claims |
| 1. A microelectromechanical system (MEMS) switch comprising:
a radio frequency (RF) transmission line;
a RF beam structure comprising a RF conductor;
a cantilevered piezoelectric actuator coupled to said RF beam structure;
a plurality of air bridges connected to said cantilevered piezoelectric actuator; and
a plurality of contact dimples on said pair on said RF beam structure.
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