| US 7,518,130 B2 | ||
| Ion beam blocking component and ion beam blocking device having the same | ||
| Jui-Fang Chen, Taichung County (Taiwan); Cheng-Hung Chang, Hsinchu (Taiwan); Chung-Jung Chen, Hsinchu (Taiwan); Chih-Ming Yang, Taipei County (Taiwan); and Chien-Kuo Ko, Hsinchu (Taiwan) | ||
| Assigned to United Microelectronics Corp., Hsinchu (Taiwan) | ||
| Filed on Apr. 30, 2007, as Appl. No. 11/742,400. | ||
| Prior Publication US 2008/0265184 A1, Oct. 30, 2008 | ||
| Int. Cl. H01J 37/317 (2006.01); H01J 37/08 (2006.01) | ||
| U.S. Cl. 250—492.21 [250/397; 250/398; 250/396 R; 250/492.1; 250/492.2; 250/492.3; 313/360.1] | 16 Claims |
| 1. An ion beam blocking component, suitable for an ion implanter to block an ion beam generated by an ion source of the ion
implanter, the ion beam blocking component comprising:
a front plate, wherein the front plate has at least one opening;
a back plate, comprising a plurality of grooves formed on one surface of the back plate facing the front plate; and
a plurality of side plates, connected between the front plate and the back plate, wherein a receiving space is formed between
the front plate, the back plate, and the side plates.
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