| US 7,517,702 B2 | ||
| Method for making an electronic device including a poled superlattice having a net electrical dipole moment | ||
| Samed Halilov, Waltham, Mass. (US); Xiangyang Huang, Waltham, Mass. (US); Ilija Dukovski, Newtonville, Mass. (US); Jean Augustin Chan Sow Fook Yiptong, Worchester, Mass. (US); Robert J. Mears, Wellesley, Mass. (US); Marek Hytha, Brookline, Mass. (US); and Robert John Stephenson, Newton Upper Falls, Mass. (US) | ||
| Assigned to MEARS Technologies, Inc., Waltham, Mass. (US) | ||
| Filed on Dec. 21, 2006, as Appl. No. 11/614,513. | ||
| Claims priority of provisional application 60/753141, filed on Dec. 22, 2005. | ||
| Claims priority of provisional application 60/753143, filed on Dec. 22, 2005. | ||
| Claims priority of provisional application 60/752990, filed on Dec. 22, 2005. | ||
| Claims priority of provisional application 60/753120, filed on Dec. 22, 2005. | ||
| Claims priority of provisional application 60/753142, filed on Dec. 22, 2005. | ||
| Claims priority of provisional application 60/752985, filed on Dec. 22, 2005. | ||
| Claims priority of provisional application 60/752984, filed on Dec. 22, 2005. | ||
| Prior Publication US 2007/0161138 A1, Jul. 12, 2007 | ||
| Int. Cl. H01L 21/00 (2006.01) | ||
| U.S. Cl. 438—3 [257/E21.208; 257/E21.436; 257/E21.663] | 27 Claims |
| 1. A method for making an electronic device comprising:
forming a poled superlattice comprising a plurality of stacked groups of layers and having a net electrical dipole moment;
each group of layers of the poled superlattice comprising a plurality of stacked semiconductor monolayers defining a base
semiconductor portion and at least one non-semiconductor monolayer thereon;
the at least one non-semiconductor monolayer being constrained within a crystal lattice of adjacent base semiconductor portions,
and at least some semiconductor atoms from opposing base semiconductor portions being chemically bound together through the
at least one non-semiconductor monolayer therebetween; and
coupling at least one electrode to the poled superlattice.
|