| US 7,489,857 B2 | ||
| Process and apparatus for producing powders of metal compound containing oxygen, and the powders produced by the process | ||
| Yukichi Takamatsu, Kanagawa (Japan); Koji Kiriyama, Kanagawa (Japan); Akira Asano, Kanagawa (Japan); and Takafumi Ishii, Kanagawa (Japan) | ||
| Assigned to Japan Pionics Co., Ltd., Tokyo (Japan) | ||
| Filed on Apr. 16, 2007, as Appl. No. 11/735,732. | ||
| Application 11/735732 is a division of application No. 11/076948, filed on Mar. 11, 2005, granted, now 7,297,322. | ||
| Claims priority of application No. 2004-82629 (JP), filed on Mar. 22, 2004. | ||
| Prior Publication US 2007/0183946 A1, Aug. 09, 2007 | ||
| Int. Cl. C23C 14/00 (2006.01); C23C 16/00 (2006.01); B01J 10/02 (2006.01) | ||
| U.S. Cl. 392—388 [422/129; 422/198; 118/712] | 3 Claims |
| 1. An apparatus for producing powders of metal compound containing oxygen comprising a liquid flow controller, a vaporizer
and a reactor, which consists essentially of:
means for feeding a gas containing a material and oxygen;
means for heating the gas from the side surface of the feeding means;
means having a partition structure, for extending a gas passageway and cooling the gas, positioned at the downstream side
of the feeding means; and
means for receiving the product generated by the reaction.
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