| US 7,489,400 B1 | ||
| System and method of applying xenon arc-lamps to provide 193 nm wavelengths | ||
| Ping He, Lincoln, Nebr. (US); Martin M. Liphardt, Lincoln, Nebr. (US); and James D. Welch, Omaha, Nebr. (US) | ||
| Assigned to J.A. Woollam Co., Inc., Lincoln, Nebr. (US) | ||
| Filed on Aug. 03, 2006, as Appl. No. 11/497,921. | ||
| Application 11/497921 is a continuation in part of application No. 10/613051, filed on Jul. 07, 2003, granted, now 7,099,006. | ||
| Application 10/613051 is a continuation in part of application No. 09/945962, filed on Sep. 04, 2001, granted, now 7,075,649. | ||
| Application 09/945962 is a continuation in part of application No. 09/517125, filed on Feb. 29, 2000, abandoned. | ||
| Application 09/517125 is a continuation in part of application No. 09/246888, filed on Feb. 08, 1999, granted, now 6,084,675. | ||
| Application 09/246888 is a continuation in part of application No. 09/232257, filed on Jan. 19, 1999, granted, now 6,141,102. | ||
| Application 09/232257 is a continuation in part of application No. 09/225118, filed on Jan. 04, 1999, granted, now 6,084,674. | ||
| Application 09/225118 is a continuation in part of application No. 09/223822, filed on Jan. 04, 1999, granted, now 6,118,537. | ||
| Application 09/223822 is a continuation in part of application No. 09/225371, filed on Jan. 04, 1999, granted, now 6,100,981. | ||
| Application 09/225371 is a continuation in part of application No. 09/225076, filed on Jan. 04, 1999, granted, now 5,963,325. | ||
| Application 09/225371 is a continuation in part of application No. 09/246888. | ||
| Application 09/246888 is a continuation in part of application No. 08/912211, filed on Aug. 15, 1997, granted, now 5,872,630. | ||
| Application 08/912211 is a continuation in part of application No. 08/618820, filed on Mar. 20, 1996, granted, now 5,706,212. | ||
| Application 08/618820 is a continuation in part of application No. 08/530892, filed on Sep. 20, 1995, granted, now 5,666,201. | ||
| Application 08/618820 is a continuation in part of application No. 11/497921. | ||
| Application 11/497921 is a continuation in part of application No. 11/084827, filed on Mar. 21, 2005, granted, now 7,301,631. | ||
| Application 11/084827 is a continuation in part of application No. 10/928429, filed on Aug. 27, 2004, granted, now 7,317,529. | ||
| Application 10/928429 is a continuation in part of application No. 10/699540, filed on Nov. 01, 2003, granted, now 7,158,231. | ||
| Application 10/699540 is a continuation in part of application No. 10/613051, filed on Jul. 04, 2003, granted, now 7,099,006. | ||
| Application 10/613051 is a continuation in part of application No. 10/425801, filed on Apr. 29, 2003, granted, now 6,930,813. | ||
| Application 10/425801 is a continuation in part of application No. 09/583229, filed on May 30, 2000, granted, now 6,804,004. | ||
| Application 09/583229 is a continuation in part of application No. 09/419794, filed on Oct. 18, 1999, granted, now 6,549,282. | ||
| Claims priority of provisional application 60/229755, filed on Sep. 05, 2000. | ||
| Claims priority of provisional application 60/473615, filed on May 28, 2003. | ||
| Claims priority of provisional application 60/473616, filed on May 28, 2003. | ||
| Claims priority of provisional application 60/553032, filed on Mar. 15, 2004. | ||
| Claims priority of provisional application 60/517566, filed on Nov. 06, 2003. | ||
| Claims priority of provisional application 60/572204, filed on May 18, 2004. | ||
| Claims priority of provisional application 60/527554, filed on Dec. 06, 2003. | ||
| Claims priority of provisional application 60/527638, filed on Dec. 08, 2003. | ||
| Claims priority of provisional application 60/576466, filed on Jun. 03, 2004. | ||
| Claims priority of provisional application 60/498479, filed on Aug. 28, 2003. | ||
| Claims priority of provisional application 60/611173, filed on Sep. 17, 2004. | ||
| Claims priority of provisional application 60/749768, filed on Dec. 13, 2005. | ||
| Int. Cl. G01J 4/00 (2006.01) | ||
| U.S. Cl. 356—369 | 28 Claims |
| 1. A material system investigation system comprising at least one Xenon source of a polychromatic beam of electromagnetic
radiation, a material system supporting stage, a detector, and a processor for performing calculations that evaluate detector
output signal;
there optionally being present a polarizer between said source and said material system supporting stage, an analyzer between
said material system supporting stage and said detector, and optionally at least one compensator between said polarizer and
analyzer;
such that in use said Xenon source of a polychromatic beam of electromagnetic radiation is caused to provide a beam of electromagnetic
radiation and direct it to interact with a sample which is placed on said material system supporting stage after optionally
passing through said polarizer and analyzer and at least one compensator, and into said detector which in turn produces data
corresponding to a parameter vs. at least one selection from the group consisting of:
angle-of-incidence; and
wavelength;
including mathematical equivalents thereof;
said material system investigation system being characterized in that said source of a polychromatic beam of electromagnetic
radiation comprises only at least one Xenon arc lamp which is used to provide UV/deep UV wavelength electromagnetic radiation
without application of a supplemental source of electromagnetic radiation, in optional combination with a means for attenuating
the intensity of other wavelengths.
|