US 7,482,185 B2
Vertical pixel structures for emi-flective display and methods for making the same
Yung-Hui Yeh, Hsinchu (Taiwan); Yu-Wu Wang, Hsinchu County (Taiwan); Yu-Lung Liu, Kaohsiung (Taiwan); Chi-Chang Liao, Tainan (Taiwan); and Hsing-Lung Wang, Taoyuan County (Taiwan)
Assigned to Industrial Technology Research Institute, Hsinchu (Taiwan)
Filed on Jan. 02, 2006, as Appl. No. 11/306,549.
Claims priority of application No. 94126311 A (TW), filed on Aug. 03, 2005.
Prior Publication US 2007/0032000 A1, Feb. 08, 2007
Int. Cl. H01L 21/00 (2006.01)
U.S. Cl. 438—29  [438/30; 438/149; 257/E29.151; 345/92] 30 Claims
OG exemplary drawing
 
1. A method for manufacturing a pixel structure for a vertical emi-flective display, comprising:
providing a first substrate and a second substrate;
forming a switch layer on the first substrate, wherein the switch layer comprises a first, a second and a third switch elements, and each of the switch elements comprises a channel region, a source and a drain;
forming a first insulating layer on the switch layer;
forming a conductive layer on the first insulating layer, and patterning the conductive layer to expose a portion of the first insulating layer, wherein the remaining conductive layer respectively serves as a common electrode layer, an anode layer and a cathode connecting layer;
forming a second insulating layer on the exposed portion of the first insulating layer;
forming a self-light emitting device layer on the anode layer;
forming a cathode layer on the self-light-emitting device layer and the cathode connecting layer, wherein the cathode layer is electrically connected to the cathode connecting layer;
forming a third insulating layer on the second insulating layer and the cathode layer such a way wherein a top surface of the common electrode layer being exposed by the third insulating layer; and
forming a reflective-type display unit module layer on the second substrate, and disposing the reflective-type display unit module layer with the second substrate onto the third insulating layer.