| US 7,472,611 B2 | ||
| Stress detection method for force sensor device with multiple axis sensor and force sensor device employing this method | ||
| Toshio Hanazawa, Kanagawa (Japan); Masaaki Ono, Kanagawa (Japan); Tsutomu Miyashita, Kanagawa (Japan); Hiroshi Tokunaga, Kanagawa (Japan); and Hiroshi Ishikawa, Kawasaki (Japan) | ||
| Assigned to Fujitsu Limited, Kawasaki (Japan); and Fujitsu Media Devices, Yokohama (Japan) | ||
| Filed on Dec. 11, 2007, as Appl. No. 12/227. | ||
| Application 12/000227 is a division of application No. 11/073944, filed on Mar. 08, 2005, granted, now 7,320,253. | ||
| Claims priority of application No. 2004-109344 (JP), filed on Apr. 01, 2004; and application No. 2004-206434 (JP), filed on Jul. 13, 2004. | ||
| Prior Publication US 2008/0173106 A1, Jul. 24, 2008 | ||
| Int. Cl. G01L 1/18 (2006.01) | ||
| U.S. Cl. 73—862.626 [73/1.37; 73/1.38; 73/1.77; 73/1.78; 73/493; 73/504.02; 73/862.042; 73/862.043; 73/862.627] | 5 Claims |
| 1. A force sensor device that detects stress delivered in a detected axis direction comprising:
a frame portion with outside edges of a rectangular shape;
a weight that is disposed within the frame portion; and
four flexible beams that are arranged in orthogonal axis directions that pass through the center of the weight, the respective
one end of which is connected to the weight and the respective other end of which is connected to the frame portion at an
inclination that forms a 45° angle with the outside edge of the frame portion,
wherein each of the four flexible beams comprises a detection element a physical quantity of which varies according to the
flexibility of the beams when stress is delivered to the weight.
|